发明名称 High voltage MOS transistor and production method thereof, and semiconductor device having high voltage MOS transistor and production method thereof.
摘要 <p>A high voltage MOS transistor includes a semiconductor substrate (1) of a first semiconductor type, a gate electrode (14) formed on the semiconductor substrate via a gate oxide layer (13), first and second diffusion regions (15, 16) formed in the semiconductor substrate on both sides of the gate electrode and being of a second semiconductor type opposite to the first semiconductor type, and an electrode (38) which is directly connected to the first diffusion region (15) and is made up of a conductor layer (49) including polysilicon. An impurity concentration of the conductor layer (49) including the polysilicon is higher than an impurity concentration of the first diffusion region (15). &lt;IMAGE&gt;</p>
申请公布号 EP0445756(A1) 申请公布日期 1991.09.11
申请号 EP19910103376 申请日期 1991.03.05
申请人 FUJITSU LIMITED 发明人 IKEMASU, SHINICHIROU
分类号 H01L21/285;H01L21/336;H01L29/417;H01L29/45;H01L29/78 主分类号 H01L21/285
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