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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH03208336(A)
申请公布日期
1991.09.11
申请号
JP19900002703
申请日期
1990.01.10
申请人
FUJITSU LTD
发明人
NIWA HIDEO
分类号
H01L21/768;H01L21/28
主分类号
H01L21/768
代理机构
代理人
主权项
地址
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