METHOD AND DEVICE FOR APPLYING COATING AGENT,申请号JP19890342803-传众专利搜索

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发明名称	METHOD AND DEVICE FOR APPLYING COATING AGENT
摘要
申请公布号	JPH03207467(A)	申请公布日期	1991.09.10
申请号	JP19890342803	申请日期	1989.12.29
申请人	NEC CORP	发明人	YAMANAKA KOJI
分类号	B05C9/14;B05C11/08;B05D3/06;H01L21/027	主分类号	B05C9/14
代理机构		代理人
主权项
地址

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