| 摘要 |
<p>PURPOSE:To stabilize an operation by a method wherein, when waters are moved to a carrier from a boat or inversely, a heat-treatment boat on which the wafers are loaded is set on a boat stage, the wafers are lined up by using a guide formed at the stage and the wafers are pushed up by using a pusher. CONSTITUTION:A boat 2 on which a wafer 1 is loaded is set to a cutout part 3b of a boat stage 3; the wafer 1 is set to a wafer guide 3a of the stage 3. Then, the boat 2 is slid to the lower position of a holder 7 together with the stage 3; the wafer 1 is pushed up by using a pusher 6 and is housed in the holder 7. While a stopper 8 is made to protrude from the side face of the holder 7, the pusher 6 is lowered. After that, the stage 3 is returned to the lower part of the holder 7 together with the empty boat 2; the pusher 6 is raised; the wafer 1 held by the holder 7 is supported; the stopper 8 is extracted from the side face of the holder 7. Then, the pusher 6 is lowered together with the wafer 1; a carrier 4 is returned to its original position together with a carrier stage 5.</p> |
