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发明名称
MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT
摘要
申请公布号
JPH03205845(A)
申请公布日期
1991.09.09
申请号
JP19900001830
申请日期
1990.01.08
申请人
NEC CORP
发明人
MUKAI KANJI
分类号
H01L21/762;H01L21/76
主分类号
H01L21/762
代理机构
代理人
主权项
地址
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