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发明名称
摘要
申请公布号
JPH0342608(Y2)
申请公布日期
1991.09.06
申请号
JP19850186223U
申请日期
1985.12.02
申请人
发明人
分类号
C23C14/46;H01J27/20;H01J37/08;(IPC1-7):H01J27/20
主分类号
C23C14/46
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代理人
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