发明名称 DISCHARGE EXCITING EXCIMER LASER DEVICE
摘要 An object of the present invention is to increase a laser output and improve the insulating performance. The device according to the present invention comprises a pair of main discharge electrodes, a dielectric and an auxiliary electrode, the dielectric being formed to be cylindrical and having the side opposed to the main discharge electrodes formed into a flat plate-like portion, the auxiliary electrode being embraced within the dielectric leaving a space and being opposed to one of the main dishcarge electrode with the flat plate-like portion sandwiched therebetween.
申请公布号 CA2054756(A1) 申请公布日期 1991.09.06
申请号 CA19912054756 申请日期 1991.03.04
申请人 MITSUI PETROCHEMICAL INDUSTRIES, LTD. 发明人 WATANABE, SHUNTARO;OEDA, YASUO;OHMATA, KEN;UEHARA, MICHITO;TERADA, MITSUGU;SHIBATA, HIDEAKI;TERASHI, YUICHIRO
分类号 H01S3/038;(IPC1-7):H01S3/03 主分类号 H01S3/038
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