| 摘要 |
PURPOSE:To reduce the influence of external magnetic field generated by a TV receiver, a VTR, etc., by continuously forming a conductor film on a sensor part and a signal processing circuit part on the same substrate, and forming a plurality of apertures in a conducting film on the sensor part. CONSTITUTION:In an infrared radiation sensor, the following are formed on a silicon substrate 1; a plurality of islands 2 and 3, a sensor part 4 constituted of photo diodes in one island region 2, and a signal processing circuit 5 formed in the other island region 3 being constituted of a circuit amplifying a minute current from the sensor part 4 and a circuit controlling frequency bandwidth. On the whole part except bonding pads 6 on the sensor part 4 and the signal processing circuit part 5, an Al film 8 purposing electromagnetic shield is formed via a transparent insulating film 7, and an Al film 8a on the sensor part 4 in the Al film 8 is especially patterned in a lattice type, thereby forming a plurality of apertures 9. |
