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发明名称
CONTRACTED PROJECTION EXPOSURE DEVICE
摘要
申请公布号
JPH03203312(A)
申请公布日期
1991.09.05
申请号
JP19890342805
申请日期
1989.12.29
申请人
NEC CORP
发明人
HORIBA SHINICHI
分类号
G03F7/20;G03B27/32;H01L21/027;H01L21/30
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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