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发明名称
ANORDNUNG ZUM MESSEN VON STRUKTURBREITEN UND- ABSTAENDEN IM MIKROMETER- UND SUBMIKROMETERBEREICH
摘要
申请公布号
DD293642(A5)
申请公布日期
1991.09.05
申请号
DD19900339765
申请日期
1990.04.17
申请人
CARL ZEISS JENA GMBH,DE
发明人
MENZEL,WERNER,DE
分类号
G01B11/02;(IPC1-7):G01B11/02
主分类号
G01B11/02
代理机构
代理人
主权项
地址
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