发明名称 SEMICONDUCTOR DEVICE
摘要 PURPOSE:To obtain a semiconductor device of high integration degree, by constituting an element isolation region formed on a semiconductor substrate surface by using a conducting layer which covers the isolation region and stretches as fast as the element region, and connecting said layer with a constant voltage source. CONSTITUTION:Between adjacent element regions 6, a region exists where element isolation regions are smaller than those of the other parts and closely neighbored to each other. On said region, a second polycrystalline Si electrode 8 is arranged, which is connected with a constant voltage source and stretches on the region 6. Even in the case of a parasitic MOS transistor whose element isolation region width is short, e.g. 0.6mum, electric conduction is not generated and the breakdown strength between elements is not deteriorated even when a supply voltage happens to change larger than or equal to 20%, because the transistor has a threshold value of about 5V. Hence the element isolation region width can be reduced, and the integration degree of an element can be increased.
申请公布号 JPH03203352(A) 申请公布日期 1991.09.05
申请号 JP19890342838 申请日期 1989.12.29
申请人 NEC CORP 发明人 KIMURA TAKEMI
分类号 H01L21/76;H01L21/8242;H01L27/08;H01L27/10;H01L27/108 主分类号 H01L21/76
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