| 摘要 |
PURPOSE:To enhance safety by a method wherein a terminal voltage of a switching element is detected by using a voltage detection circuit and, when the voltage is in a prescribed voltage region, a switching permission signal is sent out to a pulse high-voltage power supply from a switching permission circuit. CONSTITUTION:A grid voltage of a thyratron 2 is detected. when the voltage is a comparison voltage vk or lower, a switching permission signal is sent out to individual thyristors 8, 9 of a pulser high-voltage power supply 1. A pulse energy is output from the pulse high-voltage power supply 1, a main capacitor 3 is charged, the thyratron 2 is ignited, the pulse energy is supplied to a gas laser tube 4 and a laser is oscillated. Consequently, the pulse energy is not output from the pulse high-voltage power supply 1 until the thyratron 2 is restored and while the thyratron 2 is abnormal. Thereby, a large electric current does not flow to the secondary side of a pulse transformer, and safety is enhanced. |
