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经营范围
发明名称
SPUTTERING DEVICE
摘要
申请公布号
JPH03202466(A)
申请公布日期
1991.09.04
申请号
JP19890344459
申请日期
1989.12.28
申请人
FUJITSU LTD
发明人
TAKAGI MASAHIRO;FUKAZAWA FUMIO
分类号
C23C14/34;G11B5/85;G11B5/851
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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