发明名称 Micromachined bonding surfaces and method of forming the same
摘要 A method of encapsulating a lead bonding pad region of an integrated circuit (such as a sensor used in an implantable medical device) is disclosed. The excapsulant (such as Teflon TM -TFE) is mechanically gripped on the surface of the circuit by anchor interlock portions which are held in undercut grooves, micromachined, in a predefined pattern, in the circuit substrate. The encapsulant is held down by the portions in the grooves, forms a tight mechanical seal with the substrate surface and with the insulation around an attached lead, and blocks intrusion of contaminants along the surfaces between these materials or through the encapsulant.
申请公布号 US5045151(A) 申请公布日期 1991.09.03
申请号 US19890422540 申请日期 1989.10.17
申请人 MASSACHUSETTS INSTITUTE OF TECHNOLOGY 发明人 EDELL, DAVID J.
分类号 H01L23/29;H01L23/31;H01L23/49 主分类号 H01L23/29
代理机构 代理人
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