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发明名称
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH03201528(A)
申请公布日期
1991.09.03
申请号
JP19890342407
申请日期
1989.12.28
申请人
TOSHIBA CORP
发明人
KATSUMATA YASUHIRO
分类号
H01L29/73;H01L21/28;H01L21/283;H01L21/3205;H01L21/331;H01L21/8222;H01L23/52;H01L27/06;H01L29/732
主分类号
H01L29/73
代理机构
代理人
主权项
地址
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