Energy beam treatment for improved adhesion of coatings to surfaces

摘要

The coating of a substrate with a coating different from and non-reactive with the substrate is improved by energetic surface alloying of the substrate prior to coating. The ion implantation alters the stoichiometry of the substrate, creating a substrate surface which is reactive with the coating. For example, the bonding of TiN to Si3N4 is enhanced by implanting the substrate surface with Ti.