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发明名称
SEMICONDUCTOR TESTING DEVICE
摘要
申请公布号
JPH03201450(A)
申请公布日期
1991.09.03
申请号
JP19890340215
申请日期
1989.12.28
申请人
MITSUBISHI ELECTRIC CORP
发明人
DOI SUMIO;SHIMAZAKI MASAMITSU
分类号
H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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