| 发明名称 |
DUAL-TONE IMAGING USING NOVOLAC PHOTORESISTS AND CARBODIIMIDES |
| 摘要 |
DUAL TONE IMAGING USING NOVOLAC PHOTORESISTS AND CARBODIIMIDES The resolution and stability of liquid, dualtone photoresist formulations containing novolac resins and photoactive compounds are enhanced by the incorporation therein of certain carbodiimide resolution enhancers.
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| 申请公布号 |
CA2037385(A1) |
申请公布日期 |
1991.09.03 |
| 申请号 |
CA19912037385 |
申请日期 |
1991.03.01 |
| 申请人 |
UNION CARBIDE CHEMICALS AND PLASTICS COMPANY INC. |
发明人 |
TAYLOR, JAMES W.;BASSETT, DAVID R. |
| 分类号 |
G03F7/004;G03F7/022;H01L21/027;(IPC1-7):G03F7/004;G03F7/038;G03G5/12 |
主分类号 |
G03F7/004 |
| 代理机构 |
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| 主权项 |
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