Method of depositing fluorinated silicon nitride,申请号US19900560688-传众专利搜索

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发明名称	Method of depositing fluorinated silicon nitride
摘要
申请公布号	US5045346(A)	申请公布日期	1991.09.03
申请号	US19900560688	申请日期	1990.07.31
申请人	GTE LABORATORIES INCORPORATED	发明人	TABASKY, MARVIN J.;TWEED, BRUCE
分类号	C23C16/34;C23C16/509;H01L21/318	主分类号	C23C16/34
代理机构		代理人
主权项
地址

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