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发明名称
MICROWAVE ANTENNA FOR GENERATING PLASMA
摘要
申请公布号
JPH03201703(A)
申请公布日期
1991.09.03
申请号
JP19890339460
申请日期
1989.12.28
申请人
RIKAGAKU KENKYUSHO;TOSHIBA CORP
发明人
ISHII SHIGEYUKI;SHIBUI MASANAO
分类号
H05H1/46;H01Q11/08
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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