发明名称 EXCIMER LASER APPARATUS
摘要 PURPOSE:To increase the life of a shaft seal and to improve maintenance and economy by providing a gas reservoir for so forming a curtain of laser gas as to block a gap by spraying clean laser gas supplied from a supply unit along the outer periphery of a shaft. CONSTITUTION:A motor is driven to rotate a shaft 21 to rotate a fan, thereby circulating laser gas. Magnetic fluid 22 is collected between the inside of protrusion stripes 15 of pole pieces 13, 14 and the shaft 21 in a magnetic field of a magnet 16 to seal it therewith. On the other hand, clean laser gas 27 supplied to a gas reservoir 24 from the unit through a supply tube 26 is sprayed from a gap 27 provided between the shaft 21 and the reservoir 24 to form a curtain along the outer periphery of the shaft 21 with the sprayed gas 27, thereby preventing powder dusts from invading into a shaft seal 17 from a gap 23 between the shaft 21 and a housing 2. Thus, the life of the seal is increased, and maintenance, economy are improved.
申请公布号 JPH03200388(A) 申请公布日期 1991.09.02
申请号 JP19890342020 申请日期 1989.12.27
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 YAMANAKA KEIICHIRO;ONO TAKUHIRO;HORIUCHI NAOYA;FURUYA NOBUAKI;MIYATA TAKEO
分类号 H01S3/097;H01S3/036 主分类号 H01S3/097
代理机构 代理人
主权项
地址