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发明名称
METHOD FOR PROJECTING LASER BEAM IN PRODUCTION OF OPTICAL ELEMENT BY CVD WITH LASER
摘要
申请公布号
JPH03200151(A)
申请公布日期
1991.09.02
申请号
JP19890338572
申请日期
1989.12.28
申请人
RICOH CO LTD
发明人
TAKAURA ATSUSHI
分类号
G03F7/20;C23C16/48;C30B25/02;G02B3/00
主分类号
G03F7/20
代理机构
代理人
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