| 摘要 |
PURPOSE:To easily and accurately regulate an evaporation rate, by putting a material to be evaporated in an evaporation boat, hot-melting the material, returning the material into a solid state, and then heating and evaporating the material in the solid state. CONSTITUTION:A material to be evaporated is put in an evaporation boat, hot- melted and gradually cooled, so that the material to be evaporated turns into a uniform continuous solid phase following the concave configuration of the evaporation boat. As a result, the evaporation surface area of the material to be evaporated becomes the minimum, and variation in the surface area of the material to be evaporated during evaporation can be suppressed to the minimum level. Consequently, a constant evaporation rate having good reproducibility is obtained. |
