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发明名称
DEVICE AND METHOD FOR PULLING UP SILICON SINGLE CRYSTAL
摘要
申请公布号
JPH03199190(A)
申请公布日期
1991.08.30
申请号
JP19890338380
申请日期
1989.12.28
申请人
NIPPON STEEL CORP
发明人
MIYAZAKI YOSHIMASA
分类号
C30B15/02;C30B15/12;C30B29/06;H01L21/208
主分类号
C30B15/02
代理机构
代理人
主权项
地址
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