| 摘要 |
PURPOSE:To accurately move a table in directions X, Y, Z by driving a first vibrator for generating axial stretching vibration to be mounted on the table, and a second vibrator for generating flexural vibration in a plane perpendicular to the axial direction according to a predetermined sequence. CONSTITUTION:A first vibrator 3 having a vibration drive source for generating axial stretching vibrations and a second vibrator 4 having a vibration drive source for generating flexural vibration in a plane perpendicular to the axial direction are mounted on a table 2. The first, second vibrators 3, 4 are resonated with the vibration of the drive source, formed in a Langevin type for increasing its amplitude, respectively press-bonded to a position fixing base 35 by magnets 27, 28 to the ends of opposite side to the table 2, secured, and the drive sources of the vibrators 3, 4 are driven according to a predetermined sequence. |
