| 摘要 |
PURPOSE:To form the subject thin film improved in electrical conductivity with good reproducibility by forming plural staircase-like surfaces on a substrate surface, applying a polymn. catalyst thereon and polymerizing a monomer on this surface, thereby forming the thin film of the conductive high polymer oriented with the molecular chains in parallel with the step. CONSTITUTION:The single crystal substrate of GaAs exposing a (001) face is cut by mechanical polishing, etc., in such a manner that the face inclined by 2 deg. in the [110] direction is exposed. The substrate is then subjected to the prescribed etching and annealing to expose the staircase-like surface having the step of a0/2 height. This substrate is installed in a glow box 1 and gaseous Ar is introduced from an introducing pipe 2a. The substrate is refrigerated by an electronic refrigerator and the toluene soln. of a Ziegler-Natter catalyst is applied on the surface. Gaseous acetylene is then introduced from an introducing pipe 3a and the internal pressure is increased to about 100Torr by a rotary pump 4 to polymerize the acetylene on the substrate surface and to form the thin film of the acetylene oriented with the molecular chains in parallel with the step. The thin film of the conductive high polymer improved in the electrical conductivity is obtd. with good reproducibility in this way. |
