ULTRAVIOLET LIGHT CURING APPARATUS AND PROCESS

摘要

PATENT 504014-2007 A process and apparatus for curing an ultraviolet light curable material deposited on a substrate. A signal representing a parameter of the curing process is produced. The substrate is positioned to receive ultraviolet light from a source. A characteristic of the ultraviolet light is selected from at least two non-zero values based on the curing process parameter signal and the substrate is exposed to the selected ultraviolet light.