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发明名称
BONDING TOOL
摘要
申请公布号
JPH03198360(A)
申请公布日期
1991.08.29
申请号
JP19890336315
申请日期
1989.12.27
申请人
OGURA HOUSEKI SEIKI KOGYO KK;SHOWA DENKO KK
发明人
OGURA YOSHIGORO;UMEZAWA HIROMI;OBATA TATSUO
分类号
H01L21/603;H01L21/60
主分类号
H01L21/603
代理机构
代理人
主权项
地址
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