SYNTHESIS OF OXIDE SUPERCONDUCTOR BY MOCVD PROCESS

摘要

PURPOSE:To obtain the title superconductor with good characteristics through the MOCVD process by bringing a 1,4-dioxane vapor into contact with an organometallic raw material to make said raw material transferable into the reaction section in large quantities and in a stable manner. CONSTITUTION:In synthesizing the objective oxide superconductor through the MOCVD process where an organometal is put to chemical vapor deposition, 1,4-dioxane vapor is brought into contact with the organometallic raw material in at least one of cases: (1) on said raw material, (2) during heating said raw material, and (3) during carrying said raw material.