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发明名称
CRYSTAL GROWTH
摘要
申请公布号
JPH03197382(A)
申请公布日期
1991.08.28
申请号
JP19890339694
申请日期
1989.12.26
申请人
NEC CORP
发明人
IWATA HIROSHI
分类号
C30B23/08;C30B25/02;C30B29/40;H01L21/203;H01L21/205
主分类号
C30B23/08
代理机构
代理人
主权项
地址
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