LOW-ENERGY SCANNING TRANSMISSION ELECTRON MICROSCOPE

摘要

This low-energy scanning transmission electron microscope employs a very sharp point (1) as the source of electrons with energies in the range between 0,5 and 10 eV. The point (1) is scanned across the surface (2) of a self-supported thin film of material to be investigated at an essentially constant distance on the order of nanometers. The electrons transmitted through the specimen are sensed by a suitable detector (5), and the output signal of the detector (5) is used to control a display unit, which may be a CRT display or a plotter. Scanning of the electron-emitting point as well as of the display unit is performed by a low-energy power supply and scanning signal generating means (8). Electron-emitting point (1), scanning means (7), and electron detector (5) are all isolated from ambient sound and by a damped suspension apparatus (12).