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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH03196632(A)
申请公布日期
1991.08.28
申请号
JP19890339626
申请日期
1989.12.26
申请人
NEC CORP
发明人
YAMADA YOSHIAKI
分类号
H01L21/3205;H01L21/768;H01L23/52;H01L23/522
主分类号
H01L21/3205
代理机构
代理人
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