METHOD FOR HEAT PROCESS OF SILICON,申请号EP19900400833-传众专利搜索

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发明名称	METHOD FOR HEAT PROCESS OF SILICON
摘要
申请公布号	EP0390672(A3)	申请公布日期	1991.08.28
申请号	EP19900400833	申请日期	1990.03.27
申请人	SHIN-ETSU HANDOTAI COMPANY, LIMITED	发明人	FUSEGAWA, IZUMI;YAMAGSHI, HIROTOSHI;ABE, TAKAO
分类号	C30B33/02;C30B15/00;C30B29/06;C30B33/00;H01L21/322;H01L21/324;(IPC1-7):C30B15/00	主分类号	C30B33/02
代理机构		代理人
主权项
地址

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