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发明名称
REACTIVE ION ETCHING DEVICE
摘要
申请公布号
JPH03196622(A)
申请公布日期
1991.08.28
申请号
JP19890339640
申请日期
1989.12.26
申请人
NEC CORP
发明人
KOBAYASHI KEN
分类号
C23F4/00;H01L21/302;H01L21/3065
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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