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发明名称
METHOD FOR VAPOR GROWTH
摘要
申请公布号
JPH03197384(A)
申请公布日期
1991.08.28
申请号
JP19890337407
申请日期
1989.12.25
申请人
NEC CORP
发明人
NAKAMURA TAKAHIRO
分类号
C30B25/16;H01L21/205
主分类号
C30B25/16
代理机构
代理人
主权项
地址
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