发明名称 |
Radiation-sensitive resin composition. |
摘要 |
<p>The radiation-sensitive resin composition, containing an alkali-soluble resin, comprises 1,1-bis(4-hydroxyphenol)-1-phenylethane, 1,1,1-tris(4-hydroxyphenyl)ethane or a compound selected from a polyhydroxy compound having the following formula: <CHEM> and quinonediazidesulfonates of the polyhydroxy compound, and the like. The radiation-sensitive resin composition is suitable for use as a positive type photoresist which has such excellent developability as to inhibit effectively the generation of scum in the formation of a photoresist pattern, has high sensitivity and is excellent in heat resistance and remained thickness ratio upon development.</p> |
申请公布号 |
EP0443820(A2) |
申请公布日期 |
1991.08.28 |
申请号 |
EP19910301322 |
申请日期 |
1991.02.20 |
申请人 |
JAPAN SYNTHETIC RUBBER CO., LTD. |
发明人 |
KAJITA, TORU, JAPAN SYNTHETIC RUBBER CO. LTD.;MIURA, TAKAO;YOMOTO, YOSHIJI, JAPAN SYNTHETIC RUBBER CO. LTD.;OKUDA, CHOZO |
分类号 |
G03F7/022;C07C39/15 |
主分类号 |
G03F7/022 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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