| 摘要 |
PURPOSE:To prevent a decrease in the activity of electrodes, restrain a decrease with time in a sensor sensitiveness and exhibit a stable performance for a long period by providing a semiconductor layer between the surface of a working electrode and a solid electrolyte layer. CONSTITUTION:A semiconductor layer 60 is formed on a working electrode 20, a counter electrode 30 and a reference electrode 40 all of which are formed on the same surface of an insulating substrate 10, and over the whole surface of the substrate 10. The electrodes 20, 30 and 40 and the exposed substrate 10 between the electrodes all of which are covered by the semiconductor layer 6 are further covered by a solid electrolyte layer 50. A surface oxidation generated by water molecules or the like contained in the electrolyte layer 50 around the electrodes 20, 30 and 40 which are coupled with electrode materials is satisfactorily restricted by the semiconductor layer 60. Thus, the activity of electrodes can be maintained stable over a long period and the secular stability of a sensor sensitiveness can be improved. |
