Positive-working quinone diazide photoresist composition containing a dye

摘要

A positive type photoresist composition comprising at least one alkali-soluble resin, at least one quinone diazide compound and a compound of the general formula (I) <IMAGE> (I) wherein R1 and R2 represents alkyl groups having 1 to 8 carbon atoms or a cycloalkyl group having 1 to 8 carbon atoms, R3 represents hydrogen, an alkyl group having 1 to 4 carbon atoms or halogen, R4 represents hydrogen or a cyano group and R5 represents a cyano group or a carboxyl group.