发明名称 |
Semiconductor device inspection apparatus using a plurality of reflective elements |
摘要 |
An improved optical inspection apparatus, especially suited for inspecting semiconductor devices using a single camera. A highly polished mirrored stage is provided with a light source extending upwardly therethrough and providing a pedestal upon which the object to be inspected is centered. A plurality of stationary reflectors are disposed around the stage and function in concert with two separate movable reflectors to provide optical scanning over the appropriate surface portions of the device. A separate movable reflector system is used to maintain a constant focal path length between the device and the camera as the other movable reflectors scan the device, thus ensuring proper focus and measurement accuracy.
|
申请公布号 |
US5043589(A) |
申请公布日期 |
1991.08.27 |
申请号 |
US19900525946 |
申请日期 |
1990.05.18 |
申请人 |
TRIGON/ADCOTECH |
发明人 |
SMEDT, RODNEY;RAPHAEL, IAN |
分类号 |
G01B11/30;G01R31/308;H01L21/00 |
主分类号 |
G01B11/30 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|