Pellicle packaging and handling system

摘要

A pellicle packaging and handling system include a pellicle having a transparent pellicle film extending across a peripheral pellicle frame. A pellicle holder releasably grips the pellicle frame to form a holder/pellicle assembly, the pellicle holder being graspable to handle the holder/pellicle assembly and release the pellicle from the holder. The selectively openable enclosure houses the holder/pellicle assembly with the holder/pellicle assembly releasably retained in a fixed position within the enclosure.