An optical non-contact surface profiler for determining (i) the surface profile of a transparent layer on a light-absorbing or opaque substrate, (ii) the surface profile of a light-absorbing or opaque substrate through a transparent layer, and (iii) the thickness profile of a transparent layer on a light-absorbing or opaque surface. A microscope alternatively configured in interferometric mode and in spectrophotometric mode provides phase data from an interference pattern and reflectance data from a reflectance pattern, respectively. A photo-sensing device receives the interference patterns and reflectance patterns and inputs the corresponding phase data and reflectance data to a computing device. The computing device processes the data to determine the appropriate surface or film thickness profiles.
申请公布号
US5042949(A)
申请公布日期
1991.08.27
申请号
US19890325378
申请日期
1989.03.17
申请人
GREENBERG, JEFFREY S.;ROBINSON, JAY E.;YOUNG, JAMES M.;COHEN, DANIEL A.
发明人
GREENBERG, JEFFREY S.;ROBINSON, JAY E.;YOUNG, JAMES M.;COHEN, DANIEL A.