| 摘要 |
PURPOSE:To improve resolution in a depth direction by simultaneously radiating primary ions of the same kind to the same point on a sample from a plurality of different angles and mass-analyzing secondary ions obtained by the radiation. CONSTITUTION:A mass spectrometer 6 is equipped with a plurality of ion sources 1, 2, a measurement chamber 3, a preliminary exhaust chamber 5 and a detector 7. A sample 4 is led from the preliminary exhaust chamber 5 into the measurement chamber 3, and a point of the sample 4 is subjected to etching from two different angles by primary ion beams of the same kind radiated from the two ion sources 1, 2. Secondary ions obtained at this time are subjected to mass analysis by the mass spectrometer 6 to be detected by the detector 7. Thus resolution in a depth direction can be improved. |
