| 摘要 |
PURPOSE:To obtain the stamper having an excellent release property by irradiating a photoresist formed with rugged signals after development with an X-ray, etc., to cure the resist and removing the photoresist still sticking and remaining to and on the stamper obtd. by electrocasting after the above-mentioned curing by an electrolytic polishing method. CONSTITUTION:The photoresist remaining on the stamper obtd. by irradiating the photoresist with the X-ray, etc., before or during the deposition of a metallic thin film to cure the photoresist and subjecting the same to the electrocasting is removed by the electrolytic polishing method. The electrolytic polishing is executed by installing the stamper obtd. by releasing the same from the photoresist as a positive electrode and a metallic plate, such as stainless steel, as a negative electrode, immersing the stamper and the plate into an aq. alkaline soln. and energizing the same. The remaining photoresist is then peeled and removed in the form of a thin film from the stamper. The stamper having the good release property of the disk and the stamper is obtd. in this way and the molding defect rate of the disk is decreased. |
