PLASMA PROCESSOR IN SEMICONDUCTOR WAFER AND OPERATING METHOD THEREOF,申请号JP19900326094-传众专利搜索

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发明名称	PLASMA PROCESSOR IN SEMICONDUCTOR WAFER AND OPERATING METHOD THEREOF
摘要
申请公布号	JPH03194842(A)	申请公布日期	1991.08.26
申请号	JP19900326094	申请日期	1990.11.29
申请人		发明人
分类号	H01J37/32;H01L21/00;H01L21/205;H01L21/302;H01L21/3065	主分类号	H01J37/32
代理机构		代理人
主权项
地址

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