REACTIVE ION-BEAM ETCHING DEVICE,申请号JP19890335308-传众专利搜索

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发明名称	REACTIVE ION-BEAM ETCHING DEVICE
摘要
申请公布号	JPH03193888(A)	申请公布日期	1991.08.23
申请号	JP19890335308	申请日期	1989.12.25
申请人	OKI ELECTRIC IND CO LTD	发明人	USHIKUBO TAKASHI;OKAYAMA HIDEAKI
分类号	C23F4/00;H01L21/302;H01L21/3065	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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