| 摘要 |
PURPOSE:To produce a liquid phase epitaxially grown film only on one surface of a substrate by growing a liquid phase epitaxially grown film by holding a substrate to be treated by a holder formed of a hollow member and a holding member. CONSTITUTION:A holder 2 is formed of a hollow member 3 and a holding member 4 airtightly welded to the end of the member 3. The holder 2 is connected to a vacuum pump 6 via a pipe 5. In the holder 2 is held in vacuum by the operation of the pump 6, thereby holding a gadolinium garnet substrate 1. The holder 2 is dipped in a solution 8 contained in a liquid tank 7, thereby producing a liquid phase epitaxially grown film on the surface of the substrate 1. |
