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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE USING BONDED SUBSTRATES
摘要
申请公布号
JPH03192751(A)
申请公布日期
1991.08.22
申请号
JP19890333242
申请日期
1989.12.21
申请人
FUJI ELECTRIC CO LTD
发明人
TADA HAJIME
分类号
H01L21/762;H01L21/76
主分类号
H01L21/762
代理机构
代理人
主权项
地址
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