VORRICHTUNG ZUM STUETZEN EINES HALBLEITERKRISTALLSTABES.

摘要

A supporting apparatus (1) for a semiconductor monocrystal rod (15) comprises a movable ring (10) adapted to move freely in horizontal direction unless it is engaged with the monocrystal rod, a lock means to prevent the movable ring from horizontally moving, and a drive means to elevate the movable ring.