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经营范围
发明名称
SEMICONDUCTOR MANUFACTURING DEVICE
摘要
申请公布号
JPH03191523(A)
申请公布日期
1991.08.21
申请号
JP19890332070
申请日期
1989.12.20
申请人
NEC CORP
发明人
YAMAMURA KIYOMI
分类号
H01L21/306
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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