| 摘要 |
PURPOSE:To form a diamond easily and quickly by marring and activating the face to be processed of a substrate in the reactor preserved in a constant atmosphere, and forming a diamond on the substrate in this atmosphere. CONSTITUTION:In the condition that the inside of a reactor is maintained at a specified vacuum by an exhaust means 12 and that a current is applied to a heater 3 for substrate heating, an abrasive means 11 is reciprocated to mar the surface 2a to be processed of a substrate 2 and put it in activated conditions. In this condition, the abrasive means 11 is separated from the substrate 2, and reaction gas is supplied from a gas mixer 5 into the reactor 1, and also an ultraviolet ray is applied from an ultraviolet-ray generator 1A to the substrate 2 for a specified time, whereupon the nucleus of a diamond is generated to the surface 2a to be processed, and also it grows and a film-shaped diamond is created. That is, without the activated surface to be processed of the substrate after marring contacting with the air and without the oxide film being formed hereby, a film-shaped diamond can be formed surely and quickly. |
